Wofly Technology supports end-to-end collaboration across the entire materials R&D and production chain with its one-stop specialty gas system solutions

Special Gases Lay the Foundation; Core and Chain Move Forward Together

From September 9 to 11, 2026, the IICIE International Integrated Circuit Innovation Expo was held at the Shenzhen World Exhibition & Convention Center (Bao’an). Under the theme “Cross-Industry Integration · Full-Chain Collaboration: Building a Distinctive Chip Ecosystem Together,” the event covered the entire supply chain, including chip design, wafer fabrication, packaging and testing, core equipment, and key materials. Semiconductor materials occupy the upstream segment of the industry chain. Electronic specialty gases, photoresists, sputtering targets, and CMP materials directly determine device yield and process nodes; their purity, stability, and supply security are prerequisites for breakthroughs in advanced processes.

                      2026 IICIE International Integrated Circuit Innovation Expo

This year’s IICIE brings together IDMs, fabless companies, wafer foundries, OSATs, and semiconductor equipment and materials manufacturers. With an exhibition area exceeding 60,000 square meters, the event showcases end-to-end product solutions spanning chip design, wafer manufacturing, advanced packaging and testing, core equipment, and key materials and components. Held concurrently with CIOE China International Optoelectronics Expo, the event creates a “optoelectronics + semiconductors” super exhibition ecosystem, attracting professional visitors from downstream application sectors—including artificial intelligence, automotive electronics, communications and computing, displays, and new energy—to network and explore business opportunities. Against the dual backdrop of changes in the external technological environment and the demand for domestic substitution, IICIE provides a one-stop platform for domestically produced semiconductor materials, equipment, and components—covering everything from technical validation and supply chain matching to application implementation. By promoting in-depth collaboration among upstream material companies, midstream manufacturers, and downstream end-users, the event plays a landmark role in stabilizing the domestic integrated circuit industry chain and supply chain, as well as accelerating the mass production validation and ecosystem maturation of key materials.

1. Special Gas Transportation: Wofly Takes the Lead

                                Semiconductor Materials Research and Development

In the areas of materials R&D and mass production, specialty gases used in the electronics industry—such as silane (SiH₄), phosphine (PH₃), arsine (AsH₃), ammonia (NH₃), and nitrogen trifluoride (NF₃)—are highly toxic, flammable, and highly corrosive. They must be delivered safely, continuously, and at high purity from the gas source to the process end via dedicated gas delivery systems. As a National High-Tech Enterprise, Shenzhen Wofly Technology positions itself as a one-stop solution provider for gas application system engineering, offering professional services and high-quality equipment to the semiconductor materials production sector.

2. Design and Delivery: A Seamless, One-Stop Process

                                       Special Gas Transmission Pipeline System

Technical Consulting, System Design

From process gas lists, gas consumption point loads, and safety zones to pipeline topologies, WoFei Technology provides comprehensive planning and system design, delivering PID diagrams, bills of materials, and cleanroom construction specifications for multi-medium systems involving bulk gases, specialty gases for the electronics industry, and high-purity chemicals.

                                                                                                                                             Bulk Gas Piping

Special Gas Cabinet Assembly—Automatic Switching

Our independently developed, fully automatic specialty gas cabinet features a PLC as its control core and a touchscreen HMI, enabling automatic switching between two cylinders, pressure monitoring, leak alarms, and emergency shut-off. It is designed for the sealed transport of flammable, explosive, and highly toxic gases such as silane (SiH₄) and phosphine (PH₃).

                                                                                                            Special Gas Cabinets Manufactured by Wofly Technology

Valves and Fittings: High-Purity Control

Equipped with high-purity control components such as the WR1200 series pressure-reducing valves and the MV4/MVH4 series diaphragm valves, the valve bodies are made of 316L stainless steel with electrolytically polished inner surfaces. Combined with VCR fittings and ferrule fittings, these components minimize particulate levels and metal leaching to meet process requirements.

                                              Wofly Technology Valves and Fittings

Pipe Prefabrication, Secondary Piping

On-site piping is cut, automatically welded, and purged in a clean prefabrication workshop, then re-routed to the process equipment interfaces using rail-mounted welding. The piping weld traceability records are verifiable and meet SEMI standards for gas purity and particulate matter control.

Wofly Technology's Class 1,000 Cleanroom

Exhaust Gas Treatment: On-Site Purification

To address components such as SiH₄, PH₃, and AsH₃ that have not fully reacted in the process exhaust gas, a Local Scrubber exhaust gas treatment system has been installed. This system uses combustion, scrubbing, or adsorption to break down harmful components to levels that meet emission standards before discharge, ensuring the safety of personnel and the environment.

                                              Exhaust Gas Treatment Equipment

Gas Blending, Valve Distribution

For semiconductor materials R&D, we provide gas mixers and valve manifolds (VMB): The mixers precisely blend carrier gases such as N₂, Ar, and H₂ with reaction gases according to process recipes; the valve manifolds enable independent control, pressure monitoring, and emergency shut-off for multiple gas outlets in the secondary piping section.

                                                   VMB Valve Box Panel Display

Installation and Commissioning; System Testing

After on-site installation was completed, WoFei Technology conducted helium leak testing, particle size testing, moisture and oxygen content analysis, and purging and replacement, issued a system inspection report, completed the turnkey handover, and provided follow-up operation and maintenance support.

3. Building a Future Together, Hand in Hand

                                                              Wofly Technology

Competition in the semiconductor materials industry ultimately comes down to the reliability of every gas supply, every pipeline, and every valve operation. “Full-Chain Collaboration” is not merely a trade show theme; it requires upstream material manufacturers, midstream equipment suppliers, and downstream engineering service providers to continuously align on standards, interfaces, and process requirements. Shenzhen WoFei Technology will continue to focus on gas application system engineering. Leveraging its one-stop capabilities in system design, core equipment, on-site installation, and testing, commissioning, and maintenance, the company will provide a safe, stable, and traceable gas delivery foundation for semiconductor material R&D and mass production, working with all parties in the industry chain to jointly build a distinctive semiconductor ecosystem.